The aixDBLI is a highly accurate laser interferometry system designed to measure ultra-small thickness changes in piezoelectric thin films under electrical excitation. Using a proven double beam technique, it eliminates bending artifacts and achieves resolutions as fine as 0.2 pm/V. Ideal for both R&D and mass production, it offers fast measurement, wafer mapping, and high repeatability for process control and optimization.
Piezoelectric Evaluation System

The Piezoelectric Evaluation System (aixPES) is a multifunctional test platform designed for comprehensive electrical and electromechanical characterization of piezoelectric materials and devices. First introduced in 2002, it has become an industry standard for piezoelectric testing, offering high accuracy, repeatability, and flexibility. With modular sample holders and extensions, aixPES supports bulk ceramics, thin films, polymers, and […]
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Ceramic Multilayer Actuator test bench (aixCMA)
The aixCMA is a high-precision test bench for comprehensive electrical and electromechanical characterization of ceramic multilayer actuators and sensors. It supports measurements of blocking force, stiffness, and d33 under variable temperatures and user-defined waveforms. With flexible sample holders and a wide force range up to 20 kN, it adapts to devices from MEMS to large industrial actuators.